Microelectromechanical device having an oscillating mass and a forcing stage, and method of controlling a microelectromechanical device

ABSTRACT

A microelectromechanical device includes: a body; a movable mass, elastically coupled to the body and oscillatable with respect to the body according to a degree of freedom; a frequency detector, configured to detect a current oscillation frequency of the movable mass; and a forcing stage, capacitively coupled to the movable mass and configured to provide energy to the movable mass through forcing signals having a forcing frequency equal to the current oscillation frequency detected by the frequency detector, at least in a first transient operating condition.

BACKGROUND

1. Technical Field

The present disclosure relates to a microelectromechanical device havingan oscillating mass and a forcing stage and a method for controlling amicroelectromechanical device.

2. Description of the Related Art

As is known, the use of microelectromechanical systems (MEMS) hasincreasingly spread in various technological sectors and has yieldedencouraging results especially in providing inertial sensors,micro-integrated gyroscopes, and electromechanical oscillators for awide range of applications.

MEMS systems of this type are usually based upon microelectromechanicalstructures comprising at least one mass connected to a fixed body(stator) by springs and movable with respect to the stator according toone or more degrees of freedom. The movable mass and the stator arecapacitively coupled through a plurality of respective comb-fingered andmutually facing electrodes so as to form capacitors. The movement of themovable mass with respect to the stator, for example on account of anexternal stress, modifies the capacitance of the capacitors. Thus, bysensing capacitance, it is possible to trace back to the relativedisplacement of the movable mass with respect to the fixed body andhence to the force applied. Instead, by providing appropriate biasingvoltages, it is possible to apply an electrostatic force to the movablemass to set it in motion. In addition, for providing electromechanicaloscillators the frequency response of MEMS inertial structures isexploited, which is typically of a second-order low-pass type with oneresonance frequency.

MEMS gyroscopes have a more complex electromechanical structure, whichcomprises two masses that are movable with respect to the stator and arecoupled to one another so as to have a relative degree of freedom. Thetwo movable masses are both capacitively coupled to the stator. One ofthe masses is dedicated to a driving sub-system and is kept inoscillation at the resonance frequency. The other mass is drawn in the(translational or rotational) oscillatory motion and, in the event ofrotation of the microstructure with respect to a gyroscopic sensing axiswith an angular velocity, is subject to a Coriolis force proportional tothe angular velocity itself. In practice, the driven mass, which iscapacitively coupled to the fixed body through electrodes, as likewisethe driving mass, operates as an accelerometer, which enables detectionof the Coriolis force and acceleration and hence makes it possible totrace back to the angular velocity.

In gyroscopes, as likewise in other devices, the movable mass or thesystem of movable masses is maintained in oscillation at a controlledfrequency. This may be accomplished through a driving device coupled tothe micromechanical structure so as to form a resonantmicroelectromechanical loop which vibrates with controlled frequency andamplitude. Clearly, upon turning-on of the device (power-on) or at exitfrom low-consumption configurations (power-down) a start-up transientoccurs before the movable mass or the system of movable masses reaches astable condition of oscillation.

In the start-up transient, the oscillatory motion is forced throughstart-up components, which supply a fixed amount of energy, normally byapplying one or more sequences of pulses of programmed duration to themovable mass. Once the transient is exhausted, the start-up componentsare de-activated, and the oscillation is maintained by themicroelectromechanical loop that guarantee normal operation.

Sequences of pulses may be generated during start-up transients by alocal oscillator embedded in an ASIC (“Application Specific IntegratedCircuit”) chip coupled to the micromechanical structure. The overallnumber of pulses (i.e. the maximum duration of the forcing sequence ofpulses) is determined from the residual difference between theoscillation frequency of the oscillator and the microelectromechanicalloop. The residual frequency difference, in fact, causes a phase lag ateach oscillation cycle between the oscillator output and the naturalresonance frequency of the microelectromechanical loop. The overallphase delay therefore increases in time as the number of pulsesincreases and may lead to a condition in which energy provided by thelocal oscillator tends to counter rather than favoring oscillation ofthe microelectromechanical loop. In particular, the overall phase delaycannot exceed n/2 for an efficient forcing.

BRIEF SUMMARY

In order to avoid this condition, energy supply by the local oscillatoris stopped after a programmed maximum number of pulses. Thus, start-uptransients may be quite long, while it would be desirable to keep themas short as possible.

According to an aspect of the present disclosure there is provided amicroelectromechanical device comprising:

a body;

a movable mass, elastically coupled to the body and oscillatable withrespect to the body according to a degree of freedom;

a frequency detector, configured to detect a current oscillationfrequency of the movable mass; and

a forcing stage, capacitively coupled to the movable mass and configuredto provide energy to the movable mass through forcing signals having aforcing frequency equal to the current oscillation frequency detected bythe frequency detector, at least in a first transient operatingcondition.

According to another aspect of the present disclosure there is providedan electronic system having a microelectromechanical device and acontrol unit coupled to the microelectromechanical device;

the microelectromechanical device comprising:

a body;

a movable mass, elastically coupled to the body and oscillatable withrespect to the body according to a degree of freedom;

a frequency detector, configured to detect a current oscillationfrequency of the movable mass; and

a forcing stage, capacitively coupled to the movable mass and configuredto provide energy to the movable mass through forcing signals having aforcing frequency equal to the current oscillation frequency detected bythe frequency detector, at least in a first transient operatingcondition.

According to another aspect of the present disclosure there is provideda method of controlling a microelectromechanical device, comprising:

oscillating a movable mass with respect to a body according to a degreeof freedom;

detecting a current oscillation frequency of the movable mass; and

providing energy to the movable mass through forcing signals having aforcing frequency equal to the detected current oscillation frequency,at least in a first transient operating condition.

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS

For a better understanding of the disclosure, some embodiments thereofwill now be described, purely by way of non-limiting example and withreference to the attached drawings, wherein:

FIG. 1 is a simplified block diagram of a microelectromechanical devicein accordance with an embodiment of the present disclosure;

FIG. 2 is a graph showing quantities relating to themicroelectromechanical device of FIG. 1;

FIG. 3 is a graph showing quantities relating to amicroelectromechanical device in accordance with another embodiment ofthe present disclosure;

FIG. 4 is a more detailed block diagram of a first component of themicroelectromechanical device of FIG. 1;

FIG. 5 is a more detailed block diagram of a second component of themicroelectromechanical device of FIG. 1; and

FIG. 6 is a simplified block diagram of an electronic systemincorporating a microelectronic device according to one embodiment ofthe present disclosure.

DETAILED DESCRIPTION

FIG. 1 schematically illustrates a microelectromechanical gyroscope 1 inaccordance with an embodiment of the present disclosure. What ishereinafter disclosed, however, is also applicable to differentoscillating microelectromechanical devices, such as an electromechanicaloscillator for use in telecommunications or an inertial sensor withforce-feedback reading.

The gyroscope 1 comprises a microstructure 2, made of semiconductormaterial, a driving device 3, and a sensing device 5.

The microstructure 2 is made of semiconductor material and comprises asupporting body 6, a driving mass 7, and at least one sensing mass 8.For the sake of simplicity, in the embodiment illustrated hereinreference will be made to the case of a uniaxial gyroscope, in which asingle sensing mass 8 is present. The following description applies,however, also in the case of multiaxial gyroscopes, which comprise twoor more sensing masses for detecting rotations according to respectiveindependent axes.

The driving mass 7 is elastically connected through springs (not shown)to the supporting body 6 so as to be oscillatable about a restingposition in accordance with a translational or rotational degree offreedom.

The sensing mass 8 is mechanically coupled to the driving mass 7 so asto be driven in motion according to the degree of freedom of the drivingmass 7 itself. In addition, the sensing mass 8 is elastically connectedto the driving mass 7 so as to be oscillatable in turn with respect tothe driving mass 7 itself, with a respective further translational orrotational degree of freedom. In particular, in the embodiment describedherein, the driving mass 7 is linearly movable along a driving axis X,whereas the sensing mass 8 is movable with respect to the driving mass 7according to a sensing axis Y perpendicular to the driving axis X. It isunderstood, however, that the type of movement (translational orrotational) allowed by the degrees of freedom and the arrangement of thedriving and sensing axes may vary according to the type of gyroscope. Inaddition, with reference to the movements of the driving mass 7 and ofthe sensing mass 8, the expressions “according to an axis” and “inaccordance with an axis” will be used to indicate movements along anaxis or about an axis, according to whether the movements allowed to themasses by the respective degrees of freedom are translational or elserotational, respectively. In a similar way, the expressions “accordingto a degree of freedom” and “in accordance with a degree of freedom”will be used to indicate translational or rotational movements, asallowed by the degree of freedom itself.

The driving mass 7 (with the sensing mass 8) is connected to thesupporting body 6 so as to define a resonant mechanical system with oneresonance frequency (according to the driving axis X).

As illustrated schematically in FIG. 1, the driving mass 7 iscapacitively coupled to the supporting body 6 by capacitive drivingunits 10 and capacitive feedback sensing units 12. The capacitivecoupling is of a differential type and is determined by the relativeposition of the driving mass 7 with respect to the supporting body 6. Inparticular, the capacitive driving units 10 and the capacitive feedbacksensing units 12 are accessible from outside the microstructure 2through driving terminals 13 and feedback sensing terminals 14,respectively.

The sensing mass 8 is capacitively coupled to the supporting body 6 bycapacitive signal sensing units 15, accessible from outside by signalsensing terminals 16. Also in this case, the capacitive coupling is of adifferential type and is determined by the relative position of thesensing mass 8 with respect to the supporting body 6.

By way of example, but not necessarily, the microstructure 2 may beobtained as described in U.S. Pat. No. 6,928,872 for a uniaxialgyroscope, which is incorporated by reference herein in its entirety.The microstructure of a multiaxial gyroscope could be obtained, forexample, as described in detail in U.S. Pat. No. 7,694,563, which isincorporated by reference herein in its entirety.

The driving device 3 is connected to the driving terminals 13 and to thefeedback sensing terminals 14 of the microstructure 2 so as to form,with the driving mass 7, a microelectromechanical loop 19. The drivingdevice 3 is configured to maintain the microelectromechanical loop 19 inoscillation at a driving frequency cop close to the resonance frequencyof the mechanical system defined by the driving mass 7 (with the sensingmass 8) connected to the supporting body 6.

The sensing device 5 is connected to the sensing terminals 16 andconverts signals indicating the displacement of the sensing mass 8 intoan output signal S_(OUT) indicating the angular speed of themicrostructure 2.

In greater detail, the driving device 3 comprises a reading andfiltering stage 20, a variable-gain amplifier 21, an oscillator 23, acomparator 25, a phase-locked-loop (PLL) circuit 26, a controller 27, astart-up stage 30, and a forcing stage 31.

The reading and filtering stage 20 is connected to the feedback sensingterminals 14 of the microstructure 2 and in one embodiment comprises aC-V converter 20 a, such as a charge amplifier, a delay module 20 b anda continuous-time filter 20 c. The C-V converter 20 a may be adiscrete-time fully-differential charge amplifier, which has inputscoupled to the capacitive feedback sensing units 12 and is configured tosense capacitance thereof. The delay module 20 b introduces a controlledphase delay in the microelectromechanical loop 19 in order to achieve anoscillation condition for the phase (i.e. the phase of themicroelectromechanical loop 19 at the driving frequency ω_(D) is 2kπ).The continuous-time filter 20 c is an analog filter that convertsdiscrete-time signals from the delay module 20 b into correspondingcontinuous-time signals.

The reading and filtering stage 20 supplies a (continuous-time) firstfeedback signal V_(FB1), indicating the conditions of oscillation of thedriving mass 7. In particular, the first feedback signal V_(FB1)indicates the velocity of the driving mass 7. In a different embodiment,the first feedback signal V_(FB1) indicates the position of the drivingmass 7. In addition, the reading and filtering stage 20 controls thephase of the first feedback signal V_(FB1) so as to guarantee thecondition of oscillation on the phase for the microelectromechanicalloop 19.

The variable-gain amplifier 21 is coupled to the reading and filteringstage 20 for receiving the first feedback signal V_(FB1) and isselectively connectable to the feedback driving terminal 13 of themicrostructure 2 through bypass switches 28 (in effect, two connectionlines and a bypass switch 28 for each of the connection lines arepresent between the variable-gain amplifier 21 and the feedback drivingterminal 13; for reasons of simplicity, FIG. 1 represents a multipleline with just one switch).

The oscillator 23 is connected to the start-up stage 30 for supplying areference clock signal CK_(R) at a reference frequency ω_(R) that isconstant and independent of the frequency of oscillation of the drivingmass 7. In particular, the reference clock signal CK_(R) is selected sothat the reference frequency ω_(R) is near to the driving frequencyω_(D).

The comparator 25 is coupled to the reading and filtering stage 20 forreceiving the first feedback signal V_(FB1) and is configured to detectthe instants of zero crossing of the input. In practice, the output ofthe comparator 25, which is connected to the PLL circuit 26 and to thestart-up stage 30, supplies a natural clock signal CK_(N), which, insteady-state conditions, is synchronous (in frequency and phase) withthe oscillations of the driving mass 7.

The PLL circuit 26 receives the natural clock signal CK_(N) from thecomparator 25. An output of the PLL circuit 26 is connected to a clockinput 27 a of the controller 27 and supplies a main clock signal CK_(M)and a delayed clock signal CK₉₀, respectively in phase and phase-shiftedby 90° with respect to the natural clock signal CK_(N). In practice, thePLL circuit 26 has the function of a frequency detector that senses thecurrent oscillation conditions (frequency and phase) of the driving mass7 and of the microelectromechanical loop 19. The delayed clock signalCK₉₀ switches in the presence of the peaks of the first feedback signalV_(FB1). The PLL circuit 26 further supplies a lock signal S_(LOCK),having a first logic value when the PLL circuit 26 is locked to theoscillation frequency of the microelectromechanical loop 19 and a secondlogic value otherwise.

The controller 27, for example a P (Proportional), PI(Proportional-Integral) or PID (Proportional-Integral-Derivative)controller, receives the first feedback signal V_(FB1) and the delayedclock signal CK₉₀ and controls the gain of the variable-gain amplifier21 through a control signal V_(C) so as to guarantee the condition ofoscillation on the amplitude for the microelectromechanical loop 19.

The start-up stage 30 is selectively activatable in response to activevalues of one or more state signals S_(ST), which may indicate normal orsteady operating conditions, power-on conditions or conditions of exitfrom power-down. State signals S_(ST) may be automatically generated bya control unit, herein not illustrated. When activated, the start-upstage 30 controls the forcing stage 31 through a start-up signal S_(SU),as described hereinafter.

The forcing stage 31 is connectable between the output of thevariable-gain amplifier 21 and the driving terminals 13 of themicrostructure 2 through start-up switches 33, 34, controlled through anactuation signal S_(C), supplied by the start-up stage 30. The bypassswitches 28 (controlled by the negated actuation signal S_(CN)) enableconnection of the output of the variable-gain amplifier 21 directly tothe driving terminals 13, excluding the forcing stage 31.

The forcing stage 31 is controlled by the start-up stage 30 through thestart-up signal S_(SU). In particular, the forcing stage 31 isconfigured to apply forcing signals V_(F) (voltages in one embodiment)to the driving mass 7, in response to the start-up signal S_(SU).

Here and in what follows, “forcing signals” is generally used to meansinusoidal signals or sequences of pulses, such as, but not limited to,square-wave pulses, that and are applied to the driving mass 7 forproducing an electrostatic force thereon. A forcing frequency ω_(F) ofthe forcing signals V_(F) is determined by the forcing stage 31 on thebasis of the state of the PLL circuit 26 during start-up procedure.Before the PLL circuit 26 locks to the oscillation frequency of themicroelectromechanical loop 19 (lock signal S_(LOCK) at the second logicvalue), the forcing frequency ω_(F) of the forcing signals V_(F)supplied by the forcing stage 31 equals the reference frequency ω_(R) ofthe reference clock signal CK_(R). Moreover, a maximum number of cyclesof the forcing signals V_(F) is selected so that the phase delay doesnot counter oscillations of the microelectromechanical loop 19. In oneembodiment, the maximum number of cycles is selected so that the overallphase delay of the forcing signals V_(F) with respect to oscillations ofthe microelectromechanical loop 19 does not exceed π/2.

Once the PLL circuit 26 has locked to the oscillation frequency of themicroelectromechanical loop 19 (that is, the lock signal S_(LOCK) hasthe first logic value and the main clock signal CK_(M) is in phase withoscillations of the microelectromechanical loop 19), the forcing signalsV_(F) provided by the forcing circuit 31 are synchronized in frequencyand phase with the oscillations of the microelectromechanical loop 19,through the main clock signal CK_(M). Hence the forcing frequency ω_(F)equals the current oscillation frequency ω_(C) of themicroelectromechanical loop 19.

The gyroscope 1 operates as hereinafter described.

In a normal or steady operating mode, the reading and filtering stage 20and the variable-gain amplifier 21 maintain the microelectromechanicalloop 19 in oscillation at the driving frequency ω_(D) by settingappropriate gain and phase conditions, while the forcing stage 31 isexcluded and inactive. Oscillation conditions may include unitary loopgain and loop phase of 2kπ (k=0, 1, 2, . . . ) at the driving frequencyω_(D).

In the case of rotation about a gyroscopic sensing axis, the sensingmass 8 is subjected to a Coriolis acceleration, which is proportional tothe angular rate and is transduced into the output signal S_(OUT) by thesensing device 5.

At start-up of the gyroscope 1 or at exit from power-down conditions, astart-up procedure is executed by activating the start-up stage 30 andthe forcing stage 31 through the state signals S_(ST). At the same time,the start-up switches 33, 34 and the bypass switch 28 are operated toconnect the forcing stage 31 to the capacitive driving units 10 in placeof the variable-gain amplifier 21.

The start-up stage 30, through the start-up signal S_(SU), requests theforcing stage 31 to send forcing signals V_(F) to the driving mass 7,which starts to oscillate with an increasing amplitude.

As illustrated in FIG. 2, at an early stage of the start-up procedure,the PLL circuit 26 has not locked to the oscillation of the driving mass7 yet (or, generally, to the oscillations of the microelectromechanicalloop 19; the lock signal S_(LOCK) has the second logic value, which islow in the example of FIG. 2). In this condition, the forcing stage 31generates the forcing signals V_(F) at the reference frequency ω_(R) ofthe reference clock signal CK_(R). As already mentioned, the maximumnumber of cycles (i.e. the duration) of the forcing signals V_(F) at thereference frequency ω_(R) is selected to prevent that an overall phasedelay φ_(F) with respect to oscillations of the driving mass 7 mayexceed π/2. The supply of the forcing signals V_(F) is then paused inpresence of the second logic value of the lock signal S_(LOCK) and thestart-up switches 33, 34 and the bypass switch 28 are operated toconnect variable-gain amplifier 21 to the capacitive driving units 10and to disconnect the forcing stage 31. At this stage, the oscillationof the microelectromechanical loop 19 is controlled by the variable-gainamplifier 21 and the controller 27 and no forcing signals are providedby the forcing stage 31.

The PLL circuit 26 rapidly locks to the oscillations of themicroelectromechanical loop 19 (the lock signal S_(LOCK) has the firstlogic value, high in the example of FIG. 2). In response to the PLLcircuit 26 being locked, the forcing stage 31 sets the frequency of theforcing signals V_(F) at the frequency of the main clock signal CK_(M),that is, at the current oscillation frequency ω_(C) of themicroelectromechanical loop 19. Again, the start-up switches 33, 34 andthe bypass switch 28 connect the forcing stage 31 to the capacitivedriving units 10 in place of the variable-gain amplifier 21.

Thus, forcing signals V_(F) may present an increasing phase delay φ_(F)with respect to oscillations of the driving mass 7 only for a very shorttime interval at the beginning of the start-up procedure. In any case,the phase delay φ_(F) does not exceed π/2 because supply of the forcingsignals V_(F) is interrupted after the programmed maximum number ofcycles.

Once the PLL circuit 26 has locked, the forcing signals V_(F) aresynchronous in frequency and phase with the oscillations of themicroelectromechanical loop 19 and the phase delay φ_(F) remainssubstantially constant. The forcing stage 31 is configured to maintainthe phase delay φ_(F) below π/2. In one embodiment (FIG. 2), the forcingstage 31 is configured to cancel the phase delay φ_(F) (φ_(F)=0) usingphase information contained in the main clock signal CK_(M). In anotherembodiment, the phase delay φ_(F) may be not zero, but it is anyway lessthan π/2 (FIG. 3).

Since the initial increment of the phase delay φ_(F) is arrested as soonas the maximum number of cycles of the forcing signals V_(F) is reachedand the forcing signals V_(F) are synchronous with themicroelectromechanical loop 19 after the PLL circuit 26 locks, acondition in which the forcing signals V_(F) counter oscillation of thedriving mass 7 because of phase mismatch is effectively prevented.Therefore, the supply of forcing signals V_(F) does not need to beinterrupted and may be maintained as long as desired to quickly recoverfrom shut-off or power-down condition. For example, forcing signalsV_(F) may be provided until the oscillation amplitude of the drivingmass 7 exceeds an amplitude threshold A_(TH). In turn, the amplitudethreshold A_(TH) may be a fraction of a target oscillation amplitude,which is to be maintained during normal or steady operating conditions.The amplitude threshold A_(TH) may be selected to provide a safetymargin and avoid elongation over the rated target oscillation amplitude,which may cause collisions with the supporting body 6.

FIG. 4 shows an exemplary implementation of the forcing stage 31. In oneembodiment, the forcing stage 31 comprises a pulse generator 35 and atwo-way switch 36. The pulse generator 35 is selectively activatable bythe start-up signals S_(SU), when start-up conditions or exit frompower-down conditions are detected. Moreover, the pulse generator 35 isconfigured to provide the forcing signals V_(F) and its pulse generationfrequency is controlled by a clock signal received on a control terminal35 a. In particular, the pulse generator 35 provides appropriate voltagelevels to effectively transfer energy to the driving mass 7. The pulsegenerator 35 may be temporarily de-activated after the selected maximumnumber of cycles of the forcing signals V_(F), when the lock signalS_(LOCK) indicates that the PLL circuit 26 is not locked to theoscillations of the microelectromechanical loop 19, and re-activatedafterwards.

The two-way switch 36 receives the reference clock signal CK_(R) and themain clock signal CK_(M) on its inputs and has an output coupled to thecontrol terminal 35 a of the pulse generator 35. The two-way switch 36is controlled by the lock signal S_(LOCK) and is configured to supplythe control terminal 35 a with the reference clock signal CK_(R), whenthe lock signal S_(LOCK) indicates that the PLL circuit 26 is not lockedto the oscillations of the microelectromechanical loop 19, and with themain clock signal CK_(M), when the lock signal S_(LOCK) indicates thatthe PLL circuit 26 is locked to the oscillations of themicroelectromechanical loop 19.

Conditions to terminate the start-up procedure and the supply of theforcing signals V_(F) may be determined by the start-up stage 30, which,in one embodiment illustrated in FIG. 5, comprises a processing stage40, a threshold generator 41, a comparator 42 and an enable logic gate43 (e.g. an AND gate). The processing stage 40 receives the firstfeedback signal V_(FB1), which is representative of the oscillationconditions of the driving mass 7, and is configured to determine acurrent oscillation amplitude A_(C) of the microelectromechanical loop19. The comparator 42 determines an enable signal EN from the comparisonof the current oscillation amplitude A_(C) and of the amplitudethreshold A_(TH), which is provided by the threshold generator 41. Forexample, the comparator 42 is configured to set an enable signal EN toan enable value (e.g. high) when the current oscillation amplitude A_(C)is lower than the amplitude threshold A_(TH), and to a disable value(low) when the current oscillation amplitude A_(C) reaches or exceedsthe amplitude threshold A_(TH). The enable logic gate 43 receives theenable signal EN and the state signals S_(ST) and provide the start-upsignal S_(SU) on its output.

Illustrated in FIG. 6 is a portion of an electronic system 100 inaccordance with one embodiment of the present disclosure. The system 100incorporates a microelectromechanical device (for example, but notnecessarily, the gyroscope 100) and may be used in devices as, forexample, a palm-top computer (personal digital assistant, PDA), a laptopor portable computer, possibly with wireless capacity, a cellphone, amessaging device, a digital music player, a digital camera or otherdevices designed to process, store, transmit, or receive information.For example, the gyroscope 1 may be used in a digital camera fordetecting movements and performing an image stabilization. In otherembodiments, the gyroscope 1 is included in a portable computer, a PDA,or a cellphone for detecting a free-fall condition and activating asafety configuration. In a further embodiment, the gyroscope 1 isincluded in a motion-activated user interface for computers orvideo-game consoles. In a further embodiment, the gyroscope 1 isincorporated in a satellite-navigation device and is used forsimultaneous position tracking in the event of loss of thesatellite-positioning signal.

The electronic system 100 can comprise a controller 110, an input/output(I/O) device 120 (for example a keyboard or a display), the gyroscope 1,a wireless interface 140, and a memory 160, of a volatile or nonvolatiletype, coupled to one another through a bus 150. In one embodiment, abattery 180 may be used for supplying the system 100. It is to be notedthat the scope of the present disclosure is not limited to embodimentshaving necessarily one or all of the devices listed.

The controller 110 can comprise, for example, one or moremicroprocessors, microcontrollers, and the like.

The I/O device 120 may be used for generating a message. The system 100can use the wireless interface 140 for transmitting and receivingmessages to and from a wireless communications network with aradiofrequency (RF) signal. Examples of wireless interface can comprisean antenna, and a wireless transceiver, such as a dipole antenna, eventhough the scope of the present disclosure is not limited from thisstandpoint. In addition, the I/O device 120 can supply a voltagerepresenting what is stored either in the form of a digital output (ifdigital information has been stored) or in the form of analoginformation (if analogue information has been stored).

Finally, it is evident that modifications and variations may be made tothe method and to the device described herein, without thereby departingfrom the scope of the present disclosure.

The various embodiments described above can be combined to providefurther embodiments. These and other changes can be made to theembodiments in light of the above-detailed description. In general, inthe following claims, the terms used should not be construed to limitthe claims to the specific embodiments disclosed in the specificationand the claims, but should be construed to include all possibleembodiments along with the full scope of equivalents to which suchclaims are entitled. Accordingly, the claims are not limited by thedisclosure.

1. A microelectromechanical device comprising: a body; a movable mass,elastically coupled to the body and oscillatable with respect to thebody according to a degree of freedom; a frequency detector, configuredto detect a current oscillation frequency of the movable mass; and aforcing stage, capacitively coupled to the movable mass and configuredto provide energy to the movable mass through forcing signals having aforcing frequency equal to the current oscillation frequency detected bythe frequency detector, at least in a first transient operatingcondition.
 2. The microelectromechanical device according to claim 1,wherein the frequency detector is further configured to detect a currentoscillation phase of the movable mass and the forcing stage is furtherconfigured to provide the forcing signals with a constant phase delaywith respect to the current oscillation phase detected by the frequencydetector.
 3. The microelectromechanical device according to claim 2,wherein the constant phase delay is less than m/2.
 4. Themicroelectromechanical device according to claim 3, wherein the constantphase delay is zero.
 5. The microelectromechanical device according toclaim 1, comprising a driving device, coupled to the movable mass so asto form a microelectromechanical loop, the driving device configured tomaintain the microelectromechanical loop in oscillation at a drivingfrequency in a steady operating condition.
 6. The microelectromechanicaldevice according to claim 5, wherein the microelectromechanical loopincludes the frequency detector.
 7. The microelectromechanical deviceaccording to claim 5, wherein the frequency detector comprises a PLLcircuit.
 8. The microelectromechanical device according to claim 7,wherein the PLL circuit is configured to provide a main clock signalsynchronous with oscillations of the microelectromechanical loop in thefirst transient operating condition and the forcing stage is configuredto generate the forcing signals on the basis of the main clock signal inthe first transient operating condition.
 9. The microelectromechanicaldevice according to claim 8, wherein the PLL circuit is configured to belocked to the oscillations of the microelectromechanical loop in thefirst transient operating condition.
 10. The microelectromechanicaldevice according to claim 8, wherein the forcing stage is configured tobe controlled by the main clock signal in the first transient operatingcondition.
 11. The microelectromechanical device according to claim 1,comprising a oscillator, configured to provide a reference clock signal;the forcing stage being configured to generate the forcing signals onthe basis of the reference clock signal in a second transient operatingcondition.
 12. The microelectromechanical device according to claim 11,wherein the forcing stage is configured to be controlled by thereference clock signal in the first transient operating condition. 13.The microelectromechanical device according to claim 11, wherein theforcing stage is configured to generate the forcing signals in thesecond transient operating condition with a maximum number of cyclesselected so that a phase delay of the forcing signals with respect tooscillations of the movable mass does not exceed π/2.
 14. Themicroelectromechanical device according to claim 1, wherein the forcingstage comprises a pulse generator configured to be controlled by thefrequency detector in the first transient operating condition.
 15. Themicroelectromechanical device according to claim 1, comprising astart-up stage coupled to the forcing stage and configured to terminatesupply of the forcing signals based on a comparison between a currentoscillation amplitude of the movable mass and a threshold oscillationamplitude.
 16. The microelectromechanical device according to claim 1,wherein the forcing signals comprise sequences of square-wave pulses.17. An electronic system, comprising: a control unit; and amicroelectromechanical device coupled to the control unit and including:a body; a movable mass, elastically coupled to the body and oscillatablewith respect to the body according to a degree of freedom; a frequencydetector, configured to detect a current oscillation frequency of themovable mass; and a forcing stage, capacitively coupled to the movablemass and configured to provide energy to the movable mass throughforcing signals having a forcing frequency equal to the currentoscillation frequency detected by the frequency detector, at least in afirst transient operating condition.
 18. The electronic system accordingto claim 17, wherein the frequency detector is further configured todetect a current oscillation phase of the movable mass and the forcingstage is further configured to provide the forcing signals with aconstant phase delay with respect to the current oscillation phasedetected by the frequency detector.
 19. The electronic system accordingto claim 18, wherein the constant phase delay is less than π/2.
 20. Theelectronic system according to claim 19, wherein the constant phasedelay is zero.
 21. The electronic system according to claim 17,comprising a driving device, coupled to the movable mass so as to form amicroelectromechanical loop, the driving device configured to maintainthe microelectromechanical loop in oscillation at a driving frequency ina steady operating condition.
 22. The electronic system according toclaim 21, wherein the microelectromechanical loop includes the frequencydetector.
 23. The electronic system according to claim 21, wherein thefrequency detector comprises a PLL circuit.
 24. The electronic systemaccording to claim 23, wherein the PLL circuit is configured to providea main clock signal synchronous with oscillations of themicroelectromechanical loop in the first transient operating conditionand the forcing stage is configured to generate the forcing signals onthe basis of the main clock signal in the first transient operatingcondition.
 25. The electronic system according to claim 24, wherein thePLL circuit is configured to be locked to the oscillations of themicroelectromechanical loop in the first transient operating condition.26. The electronic system according to claim 24, wherein the forcingstage is configured to be controlled by the main clock signal in thefirst transient operating condition.
 27. The electronic system accordingto claim 17, comprising a oscillator, configured to provide a referenceclock signal; the forcing stage being configured to generate the forcingsignals on the basis of the reference clock signal in a second transientoperating condition.
 28. The electronic system according to claim 27,wherein the forcing stage is configured to be controlled by thereference clock signal in the first transient operating condition. 29.The electronic system according to claim 27, wherein the forcing stageis configured to generate the forcing signals in the second transientoperating condition with a maximum number of cycles selected so that aphase delay of the forcing signals with respect to oscillations of themovable mass does not exceed m/2.
 30. The electronic system according toclaim 17, wherein the forcing stage comprises a pulse generatorconfigured to be controlled by the frequency detector in the firsttransient operating condition.
 31. The electronic system according toclaim 17, comprising a start-up stage coupled to the forcing stage andconfigured to terminate supply of the forcing signals based on acomparison between a current oscillation amplitude of the movable massand a threshold oscillation amplitude.
 32. The electronic systemaccording to claim 17, wherein the forcing signals comprise sequences ofsquare-wave pulses.
 33. A method of controlling a microelectromechanicaldevice, comprising: oscillating a movable mass with respect to a bodyaccording to a degree of freedom; detecting a current oscillationfrequency of the movable mass; and providing energy to the movable massthrough forcing signals having a forcing frequency equal to the detectedcurrent oscillation frequency, at least in a first transient operatingcondition.
 34. The method according to claim 33, comprising detecting acurrent oscillation phase of the movable mass, wherein providing energycomprises providing the forcing signals with a constant phase delay withrespect to the detected current oscillation phase.
 35. The methodaccording to claim 34, wherein the constant phase delay is less thanπ/2.
 36. The method according to claim 35, wherein the constant phasedelay is zero.
 37. The method according to claim 33, comprisingmaintaining the microelectromechanical loop in oscillation at a drivingfrequency in a steady operating condition using a driving device coupledto the movable mass so as to form a microelectromechanical loop.
 38. Themethod according to claim 37, wherein detecting the current oscillationfrequency of the movable mass comprises providing a main clock signalsynchronous with oscillations of the microelectromechanical loop in thefirst transient operating condition, and the forcing signals aregenerated on the basis of the main clock signal in the first transientoperating condition.
 39. The method according to claim 33, whereindetecting the current oscillation frequency of the movable masscomprises using a PLL circuit.
 40. The method according to claim 33,providing a reference clock signal, independent of oscillations of themovable mass; wherein providing energy to the movable mass throughforcing signals comprises generating the forcing signals on the basis ofthe reference clock signal in a second transient operating condition.41. The method according to claim 40, wherein the forcing signalsinclude a maximum number of cycles in the second transient operatingcondition, the maximum number of cycles selected so that a phase delayof the forcing signals with respect to oscillations of the movable massdoes not exceed π/2.
 42. The method according to claim 33, comprising aterminating supply of the forcing signals based on a comparison betweena current oscillation amplitude of the movable mass and a thresholdoscillation amplitude.
 43. The method according to claim 33, wherein theforcing signals comprise sequences of square-wave pulses.